Verfahren zur Erzeugung einer supraleitfähigen Schicht

摘要

A superconductive layer coating method in which the substrate is drawn through a deposition chamber within which a heating zone is prepared. The substrate is coated in the heating zone with superconductive material, particularly with high temperature superconductive (HTSC) material having a critical or transition temperature above 77K. To speed up the coating process, the target (5) carrying the superconductive material and spaced from the heating zone symmetrically to a line extending through the center of an opening (9), is moved periodically transversely to the plane of oscillation of the laser beam (7) during the coating process and is periodically additionally rotated through 180 degrees in the plane of its surface scanned over by the laser beam.