| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a high-purity, monodispersed spherical ceramic particulate which is useful as a filler for a semiconductor sealing material, a sintering raw material for manufacturing machine parts or electronic components, etc., and a method for producing the same. <P>SOLUTION: The spherical ceramic particulate has an average particle size ranging from 50 to 100,000 nm, a sphericity ranging from 0.9-1.0 and a coefficient of variation (CV value) of a particle diameter of ≤20%. The method for producing the spherical ceramic particulate comprises (a) a step wherein a precursor polymer containing a metal element and/or a semi-metal element composing the spherical ceramic particulate is prepared, (b) a step wherein the precursor polymer is mixed with and dissolved in a poor solvent through heating, the precursor polymer is subsequently precipitated by cooling the solvent, and the precipitate is separated through filtering to obtain a precursor polymer particulate and (c) a step wherein the precursor polymer particulate is fired in an inert gas or an oxygen-containing atmosphere. <P>COPYRIGHT: (C)2007,JPO&INPIT |
