ION IMPLANTATION APPARATUS HAVING CRYO PUMP AND CRYO PUMP REGENERATION METHOD USING THE SAME,申请号KR20050092155-传众专利搜索

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发明名称	ION IMPLANTATION APPARATUS HAVING CRYO PUMP AND CRYO PUMP REGENERATION METHOD USING THE SAME
摘要
申请公布号	KR20070037001(A)	申请公布日期	2007.04.04
申请号	KR20050092155	申请日期	2005.09.30
申请人	SAMSUNG ELECTRONICS CO., LTD.	发明人	LEE, DONG HO
分类号	H01L21/265;H01L21/00	主分类号	H01L21/265
代理机构		代理人
主权项
地址

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