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发明名称
Method for fabricating trench isolation in semiconductor device
摘要
申请公布号
KR100702125(B1)
申请公布日期
2007.03.30
申请号
KR20050041825
申请日期
2005.05.18
申请人
发明人
分类号
H01L21/762
主分类号
H01L21/762
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