发明名称 A METHOD FOR MEASURING THE CONCENTRATION OF NITROGEN IN ARGON BY MEANS OF IONIZATION MOBILITY SPECTROMETRY
摘要 A METHOD FOR CARRYING OUT NITROGEN ANALYSIS BY IONIZATION MOBILITY SPECTROSCOPY, AT CONCENTRATIONS OF FEW PARTS PER BILION (ppb) IN ARGON IS DESCRIBED. THE METHOD INVOLVES THE ADDITION OF HYDROGEN IN CONCENTRATION OF AT LEAST 5 PPB AND LOWER THAN 100 PARTS PER MILION (ppm) TO THE ARGON TO BE ANALYZED; THE HYDROGEN ADDITION STEP IS POSSIBLY PRECEDED BY A PURIFICATION OPERATION OF THE ARGON FLOW, SO AS TO REDUCE THE TOTAL CONCENTRATION OF IMPURITIES OTHER THAN NITROGEN UNDER 1 ppb.
申请公布号 MY128966(A) 申请公布日期 2007.03.30
申请号 MYPI20015268 申请日期 2001.11.16
申请人 SAES GETTERS S.P.A. 发明人 LUCA PUSTERLA;ROBERT STIMAC;ANTONIO BONUCCI;MARCO SUCCI
分类号 B01D59/44;G01N27/62;C01B23/00;G01N27/64;G01N33/00;H01J49/00 主分类号 B01D59/44
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