ACOUSTIC SURFACE WAVE ELEMENT AND ACOUSTIC SURFACE WAVE DEVICE
摘要
<p>An acoustic surface wave element (1) is provided with an IDT electrode (11) having an electrode finger (11a) on a piezoelectric substrate (10). The electrode finger (11a) is provided by stacking an intermediate layer (12) and an electrode layer (13) having a thermal expansion coefficient larger than that of the intermediate layer (12). The electrode finger (11a) has a trapezoidal cross-section becoming wider as it goes closer to the piezoelectric substrate (10). An angle (a<SUB>1</SUB>) formed by a side plane (1) of the intermediate layer (12) is larger than an angle (ß<SUB>1</SUB>) formed by a side plane of the electrode layer (13).</p>
