| 摘要 |
PROBLEM TO BE SOLVED: To obtain a highly accurate liquid droplet ejecting head, by efficiently and highly accurately machining a cavity substrate which constitutes the liquid droplet ejecting head. SOLUTION: In a manufacturing method for a liquid droplet ejecting head in which a glass substrate 2 having an electrode 8 formed therein and a silicon substrate 41 having a flow channel including a recessed part being an ejection chamber 5 for storing and ejecting liquid formed therein, both are bonded together while making the electrode 8 and the bottom surface portion of the silicon substrate being the ejection chamber 5 face with each other via a gap G, and then the liquid flow channel is formed in the silicon substrate 41, the silicon substrate 41 bonded to the glass substrate 2 is machined into a thin plate, the machined surface is applied with a mirror surface finish, further, the machined and altered layer of the mirror surface finish surface of the silicon substrate 41 is removed by etching, and then wet etching is used to form the flow channel in the silicon substrate 41. COPYRIGHT: (C)2007,JPO&INPIT
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