| 摘要 |
<P>PROBLEM TO BE SOLVED: To obtain a glass laminated body for a liquid crystal display where the thickness of four corners of the double sided ground glass laminated body for the liquid crystal display having approximate 0.6 mm thickness is not thicker than the other part, and the width of the thickness distribution is not less than 50 μm. <P>SOLUTION: In the double sided polishing method, the square shaped substrate 3 is held in a substrate storage pocket part of a carrier 4, and the both surfaces of the square shaped substrate is simultaneously polished by passing the substrate between a pair of eccentric square shaped polishing pads 1, 2 rotating in the reverse direction. The pair of eccentric square shaped polishing pads 1, 2 are disposed so that the polishing surfaces 1a, 2a are paralleled to be rotated with different axis centers 1c, 2c, the substrate is held between the polishing pads for a certain time, and the both surfaces of the square shaped substrate is polished by intermittently reciprocatingly oscillating the carrier 4 to the right and left during polishing the square shaped substrate. <P>COPYRIGHT: (C)2007,JPO&INPIT |
