ARRAY SUBSTRATE FOR DISPLAY DEVICE, MANUFACTURING METHOD THEREFOR, AND DISPLAY DEVICE USING SAME

摘要

PROBLEM TO BE SOLVED: To provide an array substrate for a display device capable of meeting the requirements of both a display part of which a large area is required to be formed at low cost and a driving circuit part of which high mobility is required. SOLUTION: The array substrate has a display part and a driving circuit part on its transparent insulation substrate (glass substrate 1). A thin film transistor of the display part is a non-single crystal thin film transistor TrA having non-single crystal silicon layer (polycrystal silicon layer 3) as an active layer. A thin film transistor of the driving circuit part is a single crystal thin film transistor TrB having a single crystal silicon layer 4 attached to the glass substrate 1 as an active layer. The thin film transistor TrA of the display part and the thin film transistor TrB of the driving circuit part are formed by the same process. COPYRIGHT: (C)2007,JPO&INPIT