| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an optical axis adjusting auxiliary device capable of guiding easily and surely an irradiation spot to the center of a light receiving surface on the light receiving surface of a quadripartite photodetector, and facilitating an optical axis adjusting work, in the optical axis adjusting work of a scanning probe microscope or the like equipped with an optical lever type optical detection system. <P>SOLUTION: This optical axis adjusting auxiliary device equipped with a laser light source emitting laser light 16 to a reflecting member, and the photodetector 11 having the light receiving surface 12 receiving the laser light reflected by the reflecting member and comprising a plurality of divided light receiving parts 12a-12d, is used for detecting the incident position of the laser light on the light receiving surface of the photodetector, and is adopted for a position detection device equipped with an optical axis adjusting means. The optical axis adjusting auxiliary device is also equipped with an optical axis adjusting auxiliary tool 14 for converting a relation between the distance of the laser light incident position from the center on the light receiving surface of the photodetector and a detection signal from the photodetector into a relation of monotone increase or monotone decrease. <P>COPYRIGHT: (C)2007,JPO&INPIT |
