| 摘要 |
PROBLEM TO BE SOLVED: To provide an axis feed device which holds down deterioration of working accuracy due to vibration and displacement of the tool body, has excellent workability, and is suitable for precise working. SOLUTION: In this axis feed device, two cancel moving bodies 20 reciprocating in two axial directions parallel to the X-axis at an equal distance L in the horizontal direction with a slider 10 interposed between them, are provided symmetrical about a moving axis. The slider 10 is driven by a linear motor 30 including a stator 30A provided on a top lid 3 on a beam 2 and a needle 30B. The cancel moving body 20 is driven by a linear motor 40 including a stator 40A and a needle 40B. The cancel moving body 20 is independently controlled to move by a control device to move in the opposite direction to the slider 10 so that the position of the center of gravity is not moved. COPYRIGHT: (C)2007,JPO&INPIT
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