| 摘要 |
A multi-mode rotating element type ellipsometer is provided not to change a position of the ellipsometer although the ellipsometer is used as a rotation analyzer by installing a polarization remover after the analyzer. In a multi-mode rotating element type ellipsometer(300), a light source(310) illuminates light with a single color or a multi-color. A polarizer(311) polarizes the light. A phase retarder(316) changes a polarization state of the light. An analyzer(313) passes the light having a specific polarization component. A polarization removing device(317) removes a polarization state. An optical detector(315) detects the light passing through the polarization removing device. At this time, a plurality of driving motors(320) is attached to the polarizer, the phase retarder, and the analyzer. The multi-mode rotating element type ellipsometer further includes a spectroscope(314) to diffuse the light and a controller to control the plurality of driving motors.
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