发明名称 ELEMENT FORMATION SUBSTRATE, ACTIVE MATRIX SUBSTRATE AND METHOD OF MANUFACTURING THEM
摘要 PROBLEM TO BE SOLVED: To provide an active matrix substrate which can prevent any failure in a TFT due to side etching or filtration of an etchant, or lowering of element formation density on an element formation substrate, deterioration of image quality or occurrence of cracks. SOLUTION: The active matrix substrate is provided with a substrate 31, wiring comprised of a gate line 32 and a signal line 33 which are formed like a matrix on the substrate 31, and an element 1 which is arranged corresponding with the crossing area of the wiring and includes a thin film transistor 2 and contact pads 7, 8 and 9 connected with the thin-film transistor 2. In this case, the element 1 is provided with an outer side 10 separated in the in-plane direction of the substrate 31, and the channel of the thin-film transistor is arranged so that the direction of channel of the thin-film transistor may be inclined against the wiring direction of the gate lines 32 and 33 which are arranged like a matrix on the substrate. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007080853(A) 申请公布日期 2007.03.29
申请号 JP20050262840 申请日期 2005.09.09
申请人 TOSHIBA CORP 发明人 HARA YUJIRO;ONOZUKA YUTAKA;SUGI KEIJI;AKIYAMA MASAHIKO
分类号 H01L21/02;G02F1/1368;G09F9/30;H01L21/336;H01L27/12;H01L29/786 主分类号 H01L21/02
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