HEAT TREATMENT APPARATUS, COMPUTER PROGRAM AND STORAGE MEDIUM

摘要

A heat treatment apparatus (2) for performing prescribed heat treatment to a subject (W) to be treated is provided with a treatment container (4) air in which can be exhausted; a placing table (18) arranged in the treatment container (4), for placing on an upper plane the subject to be treated; a plurality of thermoelectric conversion elements (22) arranged on an upper part of the placing table (18); a light transmitting window (8) for covering a ceiling portion of the treatment container airtight; and a gas introducing means (12) for introducing a required gas into the treatment container (4). A heating means (46), which is composed of a plurality of heating light sources (52) including a semiconductor light emitting element (58) for emitting heating light to the subject to be treated, is provided above the light transmitting window (8). Thus, heating efficiency is improved and temperature can be increased and reduced at a higher speed for the subject to be treated.