| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a detoxifying apparatus which increases the measuring working efficiency and also can control a leakage of a waste gas into air when measuring of the detoxifying ratio of the waste gas is repeatedly carried out. <P>SOLUTION: The detoxifying apparatus 13 is connected with a first gas-exhausting pipe 20 which has a detoxifying unit 18 for detoxifying the waste gas 17 and is connected with a CVD apparatus 12 and the detoxifying apparatus 18, and a second gas-exhausting pipe 21 which discharges the waste gas 17a detoxified by the detoxifying unit 18 into air. Further, the detoxifying apparatus 13 has a sampling unit 19 which is continuously connected with the first gas-exhausting pipe 20 and the second gas-exhausting pipe 21 to measure the detoxifying ratio of the waste gas 17, 17a. The side of an enclosure of the detoxifying apparatus 13 is arranged with a first sampling port 35, a second sampling port 36, a first purge port 37 and a second purge port 38 which are possible to be connected with the sampling unit 19 and an infrared spectroscopy analysis apparatus 14 outside the detoxifying apparatus 13. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
