摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a rear surface junction type solar cell, including a process for structurizing a high-definition pattern of a dopant region on a semiconductor substrate with the use of inexpensive technology such as screen printing which is a substitute for expensive technology such as photolithography technology. <P>SOLUTION: A paste containing SiO<SB>2</SB>and/or an SiO<SB>2</SB>precursor is patterned to coat the semiconductor substrate and fired in an oxygen atmosphere so as to form the diffusion control mask of dopant. Doping is subsequently performed, so that a patterned diffusion layer is formed concerning the solar cell manufacturing method. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |