摘要 |
PROBLEM TO BE SOLVED: To provide an electrophotographic photoreceptor which can be improved in image defect level without lowering potential characteristics, and its manufacturing method. SOLUTION: The manufacturing method includes a process of installing a cylindrical base body having a conductive surface in a vacuum airtight filming furnace which is connected to an exhaust means and equipped with a raw material gas supply means and decomposing raw material gas with high-frequency electric power to deposit a first layer including a first lower stop layer made of a non-single-crystal material on the base body as a first step; a process of temporarily taking the base body where the first layer is laminated out of the filming furnace and polishing a first layer surface as a second step; and a process of installing the base body after the process of the second step in the vacuum airtight filming furnace which is connected to the exhaust means as the third step and equipped with the raw material gas supply means and stacking a second layer including at least a second lower stop layer made of a non-single-crystal material and a photoconductive layer. COPYRIGHT: (C)2007,JPO&INPIT
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