发明名称 |
Method and apparatus for inspecting reticles implementing parallel procesing |
摘要 |
Disclosed is an apparatus for analyzing a plurality of image portions of at least a region of a sample. The apparatus includes a plurality of processors arranged to receive and analyze at least one of the image portions, and the processors being arranged to operate in parallel. The apparatus also includes a data distribution system arranged to receive image data, select at least a first processor for receiving a first image from the image data, select at least a second processor for receiving a second image from the image data, and output the first and second image portions to their selected processors.
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申请公布号 |
EP1768066(A1) |
申请公布日期 |
2007.03.28 |
申请号 |
EP20060026318 |
申请日期 |
2000.04.28 |
申请人 |
KLA-TENCOR CORPORATION |
发明人 |
GOLDBERG, EDWARD M.;JOHNSON, ERIK;MILLER, LAWRENCE R. |
分类号 |
G01N21/956;G06T7/00;G03F1/08;G06T1/00;G06T1/20 |
主分类号 |
G01N21/956 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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