WAFER TRANSFER ROBOT OF SEMICONDUCTOR MANUFACTURING EQUIPMENT USING MAPPING SENSOR INSTALLED AT UPPER PORTION OF ROBOT ARM BODY AND WAFER TRANSFER METHOD,申请号KR20050088066-传众专利搜索

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发明名称	WAFER TRANSFER ROBOT OF SEMICONDUCTOR MANUFACTURING EQUIPMENT USING MAPPING SENSOR INSTALLED AT UPPER PORTION OF ROBOT ARM BODY AND WAFER TRANSFER METHOD
摘要
申请公布号	KR20070033653(A)	申请公布日期	2007.03.27
申请号	KR20050088066	申请日期	2005.09.22
申请人		发明人
分类号	H01L21/68	主分类号	H01L21/68
代理机构		代理人
主权项
地址

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