发明名称 |
Manufacturable single-chip hydrogen sensor |
摘要 |
A robust single-chip hydrogen sensor and a method for fabricating such a sensor. By utilizing an interconnect metallization material that is the same or similar to the material used to sense hydrogen, or that is capable of withstanding an etchant used to pattern a hydrogen sensing portion, device yields are improved over prior techniques.
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申请公布号 |
US2007065345(A1) |
申请公布日期 |
2007.03.22 |
申请号 |
US20060602378 |
申请日期 |
2006.11.17 |
申请人 |
HONEYWELL INTERNATIONAL INC. |
发明人 |
O'CONNOR JAMES M. |
分类号 |
G01N30/96;G01N27/00;G01N27/414;G01N33/00 |
主分类号 |
G01N30/96 |
代理机构 |
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