| 摘要 |
<P>PROBLEM TO BE SOLVED: To form a high-quality SrCu<SB>2</SB>O<SB>2</SB>thin film related to synthesis of an SrCu<SB>2</SB>O<SB>2</SB>precursor solution used for a spin coating method and formation of a corresponding thin film. <P>SOLUTION: Sr(OAc)<SB>2</SB>, Cu(OAc)<SB>2</SB>-H<SB>2</SB>O and an acetic acid are prepared (12), and these are mixed, and then made to flow back (14). Further, ethanolamine is added (18), continuously the solution is filtered (20). The solution obtained in such a manner as this is applied onto a wafer (24), then the wafer is baked to evaporate a solvent component (30). Continuously, annealing treatment is performed in a forming gas (32). Post annealing treatment may be performed under a mixing atmosphere of oxygen and nitrogen (34). <P>COPYRIGHT: (C)2007,JPO&INPIT |
