| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus for finely adjusting a position, which can finely adjust the position of a tool or the like mounted on a movable part by slowly moving it in two axial directions orthogonal to each other, has a simple structure, and can be downsized. SOLUTION: The apparatus for finely adjusting the position is constituted of an outer peripheral frame 32, a pair of intermediate parts 35 vertically flexibly coupled respectively with both ends of both opposite longitudinal sides 32a of the frame 32, and a micromotion table 36 laterally flexibly coupled with both ends of the pair of intermediate parts 35, which are formed by clipping from a single base 30 by a slit 31 vertically passing through the front and rear of the base 30. The intermediate part 35 is finely moved vertically by a vertical fine-motion device 37 and the micromotion table 36 is laterally fine-moved by a lateral fine-motion device 38. COPYRIGHT: (C)2007,JPO&INPIT
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