CARRYING MECHANISM, CARRYING DEVICE, AND VACUUM TREATMENT DEVICE

摘要

A carrying device capable of carrying an article to be carried to a correct position while preventing the article from being contaminated by dust. The carrying device comprises first and second parallelogram linkages (13, 14). The second parallelogram linkage (14) is formed by using the link (10) of the first parallelogram linkage (13). The second linkage (14) has four sides of equal length, and linearly extends and retracts along a linear guide (12a). The links (7a, 9a) of the first parallelogram linkage (13) and the links (7b, 9b) of the second parallelogram linkage (14) are rotated, in a restrained state at 90°, around pivots (7c, 9c) at both ends of the link (10) common to the first and second parallelogram linkages (13, 14). An arm (8a) formed to be rotated in a restrained state at 90° relative to a link (8b) is fitted to a pivot (2) at the end of the link (8b) facing the link (10) of the first parallelogram linkage (13).