发明名称 Semiconductor device and manufacturing method thereof
摘要 The present invention discloses a semiconductor device and a manufacturing method thereof which improves its characteristics even though it is miniaturized. According to one aspect of the present invention, it is provided a semiconductor device comprising a first semiconductor element device including a pair of first diffusion layers formed in the semiconductor substrate with a first gate electrode therebetween, and a first conductor layer formed in the first diffusion layer and having an internal stress in a first direction, and a second semiconductor element device including a pair of second diffusion layers formed in the semiconductor substrate with a second gate electrode therebetween, and a second conductor layer formed in the second diffusion layer, having an internal stress in a second direction opposite to the first direction, and constituted of the same element as that of the first conductor layer.
申请公布号 US2007066001(A1) 申请公布日期 2007.03.22
申请号 US20060340517 申请日期 2006.01.27
申请人 IINUMA TOSHIHIKO 发明人 IINUMA TOSHIHIKO
分类号 H01L21/8238 主分类号 H01L21/8238
代理机构 代理人
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