发明名称 |
Piezoelectric actuator, method of manufacturing piezoelectric actuator, and liquid ejection head |
摘要 |
The piezoelectric actuator comprises: a substrate; a constraint force buffering layer which is formed on the substrate and made of a hardness control material having low hardness; and a piezoelectric element which is formed directly on the constraint force buffering layer.
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申请公布号 |
US2007063615(A1) |
申请公布日期 |
2007.03.22 |
申请号 |
US20060472391 |
申请日期 |
2006.06.22 |
申请人 |
FUJI PHOTO FILM CO., LTD. |
发明人 |
NIHEI YASUKAZU |
分类号 |
H01L41/00 |
主分类号 |
H01L41/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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