发明名称 Piezoelectric actuator, method of manufacturing piezoelectric actuator, and liquid ejection head
摘要 The piezoelectric actuator comprises: a substrate; a constraint force buffering layer which is formed on the substrate and made of a hardness control material having low hardness; and a piezoelectric element which is formed directly on the constraint force buffering layer.
申请公布号 US2007063615(A1) 申请公布日期 2007.03.22
申请号 US20060472391 申请日期 2006.06.22
申请人 FUJI PHOTO FILM CO., LTD. 发明人 NIHEI YASUKAZU
分类号 H01L41/00 主分类号 H01L41/00
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