| 摘要 |
<p>A fluid controller without a dead volume, comprising a fluid passage having a loop-like passage part (L) and a first inlet passage part (B1), a second inlet passage part (B2), and a shared outlet passage part (B3) extending from the predetermined positions (P1), (P2) and (P3) of the loop-like passage part (L) to a first inlet (A1), a second inlet (A2), and a shared outlet (A3). A first opening/closing valve (V1) opening and closing the first inlet passage part (B1) and a second opening/closing valve (V2) opening and closing the second inlet passage part (B2) are installed in the fluid passage. Both a first fluid flowing from the first inlet (A1) to the loop-like passage part (L) and a second fluid flowing from the second inlet (A2) to the loop-like passage part (L) are discharged from the shared outlet (A3) after flowing through the loop-like passage part (L) separately from each other.</p> |
