发明名称 Semiconductor device, method for manufacturing the same, circuit substrate and electronic device
摘要 The invention provides highly reliable semiconductor devices, methods for manufacturing the same, circuit substrates and electronic devices. A semiconductor substrate is provided that includes: an integrated circuit and a pad defining a through hole electrically connected to the integrated circuit. A convex section is formed at a first surface where the pad is formed in a region that overlaps the through hole in the semiconductor substrate. A dielectric layer is formed on an inner surface of the convex section. An electrical connection section is provided having a conductive section disposed inside the dielectric layer and a wiring section disposed on the first surface to be electrically connected to the conductive section. An end surface of the conductive section is exposed through a second surface of the semiconductor substrate on the opposite side of the first surface.
申请公布号 US7193297(B2) 申请公布日期 2007.03.20
申请号 US20040844419 申请日期 2004.05.13
申请人 SEIKO EPSON CORPORATION 发明人 YAMAGUCHI KOJI
分类号 H01L23/52;H01L29/40;H01L21/3205;H01L21/768;H01L23/48;H01L25/065;H01L25/07;H01L25/18 主分类号 H01L23/52
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