发明名称 |
Semiconductor device, method for manufacturing the same, circuit substrate and electronic device |
摘要 |
The invention provides highly reliable semiconductor devices, methods for manufacturing the same, circuit substrates and electronic devices. A semiconductor substrate is provided that includes: an integrated circuit and a pad defining a through hole electrically connected to the integrated circuit. A convex section is formed at a first surface where the pad is formed in a region that overlaps the through hole in the semiconductor substrate. A dielectric layer is formed on an inner surface of the convex section. An electrical connection section is provided having a conductive section disposed inside the dielectric layer and a wiring section disposed on the first surface to be electrically connected to the conductive section. An end surface of the conductive section is exposed through a second surface of the semiconductor substrate on the opposite side of the first surface.
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申请公布号 |
US7193297(B2) |
申请公布日期 |
2007.03.20 |
申请号 |
US20040844419 |
申请日期 |
2004.05.13 |
申请人 |
SEIKO EPSON CORPORATION |
发明人 |
YAMAGUCHI KOJI |
分类号 |
H01L23/52;H01L29/40;H01L21/3205;H01L21/768;H01L23/48;H01L25/065;H01L25/07;H01L25/18 |
主分类号 |
H01L23/52 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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