发明名称 Semiconductor component and a method for producing the same
摘要 A semiconductor component, such as a humidity sensor, which has a semiconductor substrate, such as, for example, made of silicon, a first electrode and a second electrode and at least one first layer that is accessible for a medium acting from the outside on the semiconductor component, the first layer being arranged at least partially between the first and the second electrode. To reduce the costs for producing the semiconductor component the first layer has pores into which the medium reaches at least partially.
申请公布号 US7193290(B2) 申请公布日期 2007.03.20
申请号 US20030479563 申请日期 2003.12.03
申请人 ROBERT BOSCH GMBH 发明人 BENZEL HUBERT;WEBER HERIBERT;SCHAEFER FRANK
分类号 G01N27/22;H01L31/058;G01N27/12 主分类号 G01N27/22
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