| 摘要 |
PROBLEM TO BE SOLVED: To provide a delivery apparatus for a liquid-like substance capable of reducing scattering of a mist of the liquid-like substance and giving the high viscous liquid-like substance to a surface of a work, a delivery method for the liquid-like substance, a manufacturing apparatus for an electro-optic apparatus and a manufacturing method for an electro-optic apparatus. SOLUTION: A liquid crystal delivery apparatus 1 is provided with a liquid drop delivery head 20 charged with a liquid crystal as the liquid-like substance; a heater plate 11 as a heating means for heating the liquid drop delivery head 20; and an air discharge part 12 mounted to the liquid drop delivery head 20 and discharging air at a periphery. In the delivery step for delivering the liquid crystal to a substrate W, the liquid drop delivery head 20 is heated by the heater plate 11 and the charged high viscous liquid crystal is made to a low viscosity and is delivered. Further, the mist of the liquid crystal discharged from the liquid drop delivery head 20 is discharged from the air discharge part 12 with air at the periphery of the liquid drop delivery head 20 heated by the heater plate 11. Thereby, scattering of the mist is reduced. COPYRIGHT: (C)2007,JPO&INPIT
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