| 摘要 |
PROBLEM TO BE SOLVED: To improve throughput without spoiling measuring precision. SOLUTION: In the measuring method utilizing the attenuation of total reflection, the reaction on the sensor surface is measured by obtaining the measuring signal which fluctuates in the signal level corresponding to the light intensity. The sensor face is recovered by the cleansing process by sending the cleansing liquid after the reaction measuring process. During the cleansing process whether the sensor surface is recovered to the initial condition or not is discriminated by monitoring the measuring signal. When it is discriminated that the level of the measuring signal is recovered to the initial state, the cleansing process is terminated. COPYRIGHT: (C)2007,JPO&INPIT
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