发明名称 Verfahren und Vorrichtung zur Zuordnung von Wafern
摘要 A wafer mapping system uses a camera to acquire an image of a carrier containing wafers. In one embodiment, the acquired image is stored as rows and columns of pixels. The presence and location of a wafer in the carrier are determined by looking for pixel intensity variations in a column of the image.
申请公布号 DE60033200(D1) 申请公布日期 2007.03.15
申请号 DE2000633200 申请日期 2000.12.01
申请人 WAFERMASTERS INC. 发明人 YOO, SIK;KANG, KITAEK
分类号 G06T1/00;G06T7/00;H01L21/67 主分类号 G06T1/00
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