| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a CNT electron emitting substrate wherein electrons are uniformly emitted from the entire surface of a carbon nanotube (CNT). <P>SOLUTION: In this CNT electron emitting substrate, a plurality of CNT are almost perpendicularly disposed and integrated on a metal mask having an opening part. The carbon nanotubes may be disposed and integrated at the opening part of the metal mask. The CNT can be disposed and integrated on the metal mask by a plating process. The metal mask is mounted on the CNT formed by being perpendicularly grown on a silicon substrate, the plating process is applied in a plating bath, and the CNT are disposed and integrated on the metal mask. After that, the silicon substrate is removed to manufacture the CNT electron emitting substrate. Since the CNT grown on the silicon substrate is transferred onto the metal mask for implantation thereon, the height of the surface of the CNT is uniform, demonstrating the effect that electrons are uniformly emitted from the entire surface of electron emission. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
