发明名称 |
CMP SLURRY DELIVERY SYSTEM AND METHOD OF MIXING SLURRY THEREOF |
摘要 |
A CMP slurry delivery system includes a delivery pipe, a first slurry supply reservoir coupled to the delivery pipe for supplying an abrasive, a second slurry supply reservoir coupled to the delivery pipe for supplying a clean chemical, a third slurry supply reservoir coupled to the delivery pipe for supplying a corrosion inhibitor, and a fourth slurry supply reservoir for supplying an oxidizer.
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申请公布号 |
US2007060028(A1) |
申请公布日期 |
2007.03.15 |
申请号 |
US20060554569 |
申请日期 |
2006.10.30 |
申请人 |
CHEN SHENG-YU;HUNG TE-SUNG;CHENG CHI-PIAO;CHENG CHUNG-JUNG;NIEH KAUNG-WU;CHENG PO-YUAN;CHEN JIANN-FU;HU CHUN-TING;TSENG TZU-YU;HSIEH TZU-YI;PAI HUNG-CHI;KUO YUNG-CHIEH |
发明人 |
CHEN SHENG-YU;HUNG TE-SUNG;CHENG CHI-PIAO;CHENG CHUNG-JUNG;NIEH KAUNG-WU;CHENG PO-YUAN;CHEN JIANN-FU;HU CHUN-TING;TSENG TZU-YU;HSIEH TZU-YI;PAI HUNG-CHI;KUO YUNG-CHIEH |
分类号 |
B24B1/00 |
主分类号 |
B24B1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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