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发明名称
Probenbetrachtungsgerät und Probenbetrachtungsverfahren
摘要
申请公布号
DE10393970(T5)
申请公布日期
2007.03.15
申请号
DE2003193970T
申请日期
2003.12.03
申请人
ADVANTEST CORP.
发明人
SEYAMA, MASAHIRO;KURIBARA, MASAYUKI;HARA, TOSHIHIKO;ARAKAWA, KAZUHIRO;ARAKAWA, KAZUHIRO;IWAI, TOSHIMICHI
分类号
H01J37/20;G01N23/225;H01J37/02;H01J37/21
主分类号
H01J37/20
代理机构
代理人
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