发明名称 |
VERFAHREN ZUR HERSTELLUNG EINER ELEKTRONISCHEN VORRICHTUNG UND ELEKTRONISCHE VORRICHTUNG |
摘要 |
A method of manufacturing an electronic device, particularly an acceleration sensor, comprising providing a wafer ( 10 ) having first and second semiconductor layers ( 12, 16 ) with a buried oxide layer ( 14 ) therebetween and forming a semiconductor device (such as a detection circuit) on one side of the wafer ( 10 ) in the first semiconductor layer ( 16 ) and a micro-electromechanical systems (MEMS) device on the opposite side of the wafer ( 10 ) in the second semi-conductor layer ( 12 ). |
申请公布号 |
DE602004004513(D1) |
申请公布日期 |
2007.03.15 |
申请号 |
DE20046004513T |
申请日期 |
2004.02.10 |
申请人 |
KONINKLIJKE PHILIPS ELECTRONICS N.V. |
发明人 |
BOEZEN, HENDRIK;DEN HARTOG, G.;FRENCH, J.;MAKINWA, A. |
分类号 |
B81C1/00;B81B7/00;G01P15/08;G01P15/125 |
主分类号 |
B81C1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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