| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing the synthetic quartz glass for optical use which inhibits the occurrence of green fluorescence and red fluorescence even when irradiated with ultraviolet rays, especially short wave-length powerful ultraviolet rays such as an excimer laser or the like, and is excellent in the transmissivity of short wave-length ultraviolet rays and also is suitably used as a member for use in optics. SOLUTION: The method for manufacturing a synthetic quartz glass for use in optics comprises accommodating a synthetic quartz glass base material manufactured by a direct method in a heat-treating vessel composed of a carbon material having a Cu content of 0.1 ppm or less, and then heat-treating in such a manner that the hydrogen content may be of from 3×10<SP>18</SP>molecules/cm<SP>3</SP>or more to 1×10<SP>19</SP>molecules/cm<SP>3</SP>or less, and thus forming a molded body of the synthetic quartz glass in a rectangular parallelepiped form. COPYRIGHT: (C)2007,JPO&INPIT
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