| 摘要 |
An equipment for vacuum deposition of organic substances is provided to improve mass-production and economic efficiency of an organic substance depositing process by enabling continuous deposition and recycling of the organic substances during a long period of time. An equipment(100) for vacuum deposition of organic substances comprises: a vacuum chamber(101); a deposition substrate(102) disposed in an upper part within the vacuum chamber; a crucible(104) which is disposed under the deposition substrate, in which the organic substances are contained, and which has a heating wire(105) formed on the periphery thereof; an openable-and-closable shutter part(103) formed between the deposition substrate and the crucible; an exhaust system(107) for exhausting exhaust gas within the vacuum chamber; and a chamber inner wall(108) formed of integrally laminated flat plates which are wound in a cylindrical shape such that both ends of the laminated flat plates are superposed on one another, wherein the chamber inner wall is formed in such a way that the cylindrical shape surrounds the deposition substrate, the crucible and the shutter part within the vacuum chamber, and any one flat plate composing the integrally laminated flat plates is moved to replace a flat plate composing an innermost face of the cylindrical shape.
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