发明名称 REGION DIVIDING DEVICE, PATTERN DRAWING DEVICE, REGION DIVIDING METHOD, AND PROGRAM
摘要 PROBLEM TO BE SOLVED: To provide a method for fast dividing a polygonal region where internal angles in respective apexes become 90°or 270°into a plurality of rectangular regions while the occurrence of the rectangular regions including minute sides is suppressed. SOLUTION: In a polygonal region, a plurality of candidate line segments are acquired, each extending from a feature apex at the internal angle of 270°along with any one of two directions orthogonal to each other, shortest one of the plurality of candidate line segments is then selected as a dividing line segment, and processing of deleting a candidate line segment is repeated from an end point of the dividing line segment and the dividing line segment from the plurality of candidate line segments so that a plurality of dividing line segments are acquired from the polygonal region. Among rectangular regions after division due to the dividing line segment, a rectangular region including a minute side is coupled with other surrounding rectangular regions to generate a coupled region, region division processing is applied to the coupled region to suppress the occurrence of rectangular regions including minute sides, and the coupled region is divided again. Thus, the polygonal region is fast divided into a plurality of rectangular region while the occurrence of rectangular regions including minute sides is suppressed. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007067339(A) 申请公布日期 2007.03.15
申请号 JP20050255021 申请日期 2005.09.02
申请人 DAINIPPON SCREEN MFG CO LTD 发明人 KITAMURA KIYOSHI
分类号 H01L21/027 主分类号 H01L21/027
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