| 摘要 |
PROBLEM TO BE SOLVED: To provide a small acceleration sensor having high detection accuracy of acceleration and high reliability. SOLUTION: This acceleration sensor is equipped with support members 3a, 3b; and a vibrator 2 having a supported domain 91 supported by the support members 3a, 3b and a free vibration domain 92 not supported by the support members, wherein charge detection electrodes 22a, 22b, 22c, 22d are arranged from the free vibration domain 92 to the middle of the supported domain 91 on both main surfaces. Hereby, the charge generated in the supported domain 91 can be also utilized, and the small acceleration sensor having high detection accuracy of acceleration and high reliability can be acquired. COPYRIGHT: (C)2007,JPO&INPIT
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