发明名称 MAGNETRON CONTROL METHOD, MAGNETRON SERVICE LIFE JUDGMENT METHOD, MICROWAVE GENERATION DEVICE, MAGNETRON SERVICE LIFE JUDGMENT DEVICE, PROCESSING DEVICE, COMPUTER PROGRAM, AND STORAGE MEDIUM
摘要 <p>It is possible to increase the service life of a magnetron. There is provided a magnetron service life judgment method. A microwave generation device includes: a magnetron (74) having a cathode (80) containing a filament (78) and an anode (82) containing a hollow resonator (84) arranged to oppose to each other; a filament current measuring unit (100); and an application voltage measuring unit (102) for measuring voltage applied to the filament. According to the current and the voltage obtained by the current measuring unit (100) and the voltage measuring unit (102), a resistance value calculation unit (104) obtains a resistance value of the filament. A temperature calculating unit (106) calculates the filament temperature from the resistance value according to the resistance-temperature dependent characteristic. A filament power source (98) is controlled by a power control unit (110) so that the filament temperature is within a predetermined temperature range. Moreover, the voltage applied to the filament is successively lowered and the voltage applied to the filament when the moding phenomenon occurs is obtained as the moding voltage and the magnetron service life is judged according to the moding voltage.</p>
申请公布号 WO2007029580(A1) 申请公布日期 2007.03.15
申请号 WO2006JP317105 申请日期 2006.08.30
申请人 TOKYO ELECTRON LIMITED;KASAI, SHIGERU;OSADA, YUKI 发明人 KASAI, SHIGERU;OSADA, YUKI
分类号 H01J23/34;C23C16/511;H01J23/04;H01L21/3065;H05B6/68;H05H1/00;H05H1/46 主分类号 H01J23/34
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