发明名称 Method and apparatus to produce single crystal ingot of uniform axial resistivity
摘要 A method for producing a single crystal ingot includes steps of providing a first amount of polycrystalline material and a first amount of dopant material to form a first mixture having a first dopant concentration in a process furnace, increasing a temperature of the first mixture to provide a molten first mixture, providing a seed material to the molten first mixture, withdrawing the seed from the molten first mixture by a first distance to form a boule having a first length, providing a second amount of the polycrystalline material and a second amount of the dopant material to the molten first mixture to provide a molten second mixture having the first dopant concentration, withdrawing the first length of the boule from the molten second mixture by a second distance to form the boule having a second length, and removing the boule from the molten second mixture to form the single crystal ingot of uniform axial resistivity.
申请公布号 US2007056504(A1) 申请公布日期 2007.03.15
申请号 US20050222841 申请日期 2005.09.12
申请人 REXOR CORPORATION 发明人 LIM JOHN C.
分类号 C30B15/00;C30B21/06;C30B27/02;C30B28/10;C30B30/04 主分类号 C30B15/00
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