| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface potential evaluating system capable of controlling a distance between a photoconductor and the head of a probe even while measuring a surface potential. SOLUTION: A fiber probe 13 is used as the probe. Laser light having a wavelength by which the photoconductor 1 is not made exposed, is emitted from a laser light source 17, and the intensity of reflection light is detected by using a photodiode 20. A second piezo actuator 16 is controlled in accordance with the intensity of reflection light, and positions of the fiber probe 13 and a crystal oscillator 14 are controlled. COPYRIGHT: (C)2007,JPO&INPIT
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