| 摘要 |
The method manufactures a liquid ejection head comprising a pressure chamber which accommodates liquid, a diaphragm which forms a portion of the pressure chamber, a piezoelectric element which is disposed on the diaphragm and deforms the pressure chamber through the diaphragm to pressurize the liquid in the pressure chamber so as to eject the liquid from an ejection port in connection with the pressure chamber. The method comprises: a resist layer forming step of applying a resist in a liquid state onto the diaphragm on which the piezoelectric element has been disposed so as to cover the piezoelectric element, and curing the resist to form a resist layer on the diaphragm; a space forming step of separately removing the resist covering a movable portion of the piezoelectric element and the resist covering an electrical connection portion of the piezoelectric element, by exposing and developing the resist formed on the diaphragm, to separately form a movement space and a connection space for the piezoelectric element, in the resist layer; and a conductive material filling step of filling a conductive material into the connection space formed in the resist layer.
|
