,申请号JP20010232894-传众专利搜索

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发明名称
摘要
申请公布号	JP3891802(B2)	申请公布日期	2007.03.14
申请号	JP20010232894	申请日期	2001.07.31
申请人		发明人
分类号	C23C16/44;H01L21/31;H01L21/302;H01L21/3065	主分类号	C23C16/44
代理机构		代理人
主权项
地址

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