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发明名称
摘要
申请公布号	JP3891498(B2)	申请公布日期	2007.03.14
申请号	JP19940281188	申请日期	1994.10.19
申请人		发明人
分类号	G01R31/26;H01L21/66;G01R1/067;G01R1/073	主分类号	G01R31/26
代理机构		代理人
主权项
地址

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