| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an optical modulation element capable of widening a light-transmittable wavelength margin and thus moderating film thickness accuracy, optical system incorporation accuracy and wavelength accuracy of incident light, etc., and to provide an optical modulation element array and an exposure device using it. <P>SOLUTION: In the optical modulation element 21, a first planar substrate 23 and a movable thin film 27 respectively provided with an interference film and transparent to the light to be modulated are arranged in parallel facing each other across a clearance 25, the movable thin film 27 is displaced to the first planer substrate 23 by electrostatic force generated by applying a voltage to planer electrodes 31 and 37 respectively provided on the first planer substrate 23 and the movable thin film 27 and a light quantity to be transmitted through or reflected from the movable thin film 27 is changed. On the opposite side of the first planar substrate 23 across the movable thin film 27, a second planar substrate 47 provided with the interference film 45 and transparent to the light to be modulated is parallelly arranged facing each other across the clearance 26. <P>COPYRIGHT: (C)2003,JPO</p> |
