METHODS OF CLEANING A BOAT IN A FURNACE

摘要

A method for cleaning a boat in a furnace is provided to improve the productivity of semiconductor products by removing effectively contaminants from a surface of the boat using two-step cleaning processes and a rinse process. A first cleaning process is performed on a boat by using a first cleaning solution(S110). The first cleaning solution contains nitric acid, fluoric acid and deionized water. A second cleaning process is performed on the boat by using a second cleaning solution(S120). The second cleaning solution contains the fluoric acid and the deionized water. A rinse process is then performed on the boat by using deionized water(S130).