| 摘要 |
PROBLEM TO BE SOLVED: To prevent the number of power sources and the number of tester measuring terminals required for inspection from depending on a simultaneous measurement number when the inspection is performed by simultaneous measurement; and to increase the simultaneous measurement number. SOLUTION: Switch devices 111-113 are disposed between shared power sources 100 and each of devices 1-3 to share the power sources required for inspection, a primary inspection is performed for determining whether an LSI device of a measured object has an adverse effect on the inspection, possibility of connection of the shared power sources is controlled based on a result of the primary inspection, and a secondary inspection as a normal inspection is applied to the LSI device connected to the shared power source. A shared measuring circuit of the tester measuring terminals constituted by a timing adjusting circuit and an output shared circuit is disposed on an input/output side to share the tester measuring terminals required for inspection, thereby determining goodness/badness of an input device and each device by sharing the tester measuring terminals. The circuit and method enable inspection without making the number of power sources and the number of tester measuring terminals depend on the simultaneous measurement number. COPYRIGHT: (C)2007,JPO&INPIT
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