| 摘要 |
PROBLEM TO BE SOLVED: To accurately convey a minute article placed on a support surface. SOLUTION: The minute article conveying device has a fixed part 11; a conveying substrate provided with the support surface 16 for placing the minute article and connected to the fixed part through vibration elements in a plurality of axial directions; a conveying treatment means for applying a predetermined voltage to the respective vibration elements and conveying the minute article; and a monitoring device 33 for monitoring the minute article on the conveying substrate in the enlarged state. In this case, since the predetermined voltage is applied to the respective vibration elements and the minute article is conveyed, the minute article placed on the support surface 16 can be accurately conveyed. COPYRIGHT: (C)2007,JPO&INPIT
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