| 摘要 |
PROBLEM TO BE SOLVED: To provide a laser tracking interferometer robust against running-out of a rotary mechanism, and hardly affected by a flaw and dust on a surface of a reference sphere. SOLUTION: This laser tracking interferometer is provided with: the reference sphere 212 arranged fixedly, a carriage 214 constituted to rotate around the center of the reference sphere as the center; a laser interferometer 216 for outputting a displacement signal corresponding to a displacement of a retroreflector disposed on the carriage; displacement gages 218, 219 for outputting the displacement signal corresponding to a relative displacement between the reference sphere and the displacement gage; a data processor 250 for calculating a displacement of the retroreflector on the reference sphere, based on the displacement signals output from the displacement gages and the displacement signal output from the laser interferometer; a position detecting means 238 for outputting a position signal corresponding to a deviation amount, when a laser beam returned from the retroreflector to the laser interferometer is shifted to a direction orthogonal to an optical axis thereof; and a control means 252 for controlling the turn of the carriage to bring the deviation amount into zero, based on the position signal from the position detecting means. COPYRIGHT: (C)2007,JPO&INPIT
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